Hot hole-induced device degradation by drain junction reverse current

نویسندگان

  • K. S. Kim
  • H. J. Kim
  • P. H. Choi
  • H. S. Park
  • I. H. Joo
  • J. E. Song
  • D. H. Song
  • B. D. Choi
چکیده

Components of drain leakage currents in the off-state of MOSFET are gate-induced drain-leakage (GIDL) and drain junction reverse currents. Device degradation phenomenon and mechanism by GIDL have been well known, but those by drain junction reverse current (IDJR). have not. In this paper, device degradation mechanisms by drain junction reverse current in the off-state were studied through I-V curves (VTH and mobility) and charge pumping technique.

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عنوان ژورنال:
  • Microelectronics Reliability

دوره 53  شماره 

صفحات  -

تاریخ انتشار 2013